High-κ dielectric van der Waals integration on 2D semiconductors for three-dimensional complementary logic systems

Taeho Kang, Joonho Park, Seung Yong Lee, Hanggyo Jung, Jongwook Jeon, Yong-Hoon Kim & Sungjoo Lee

Nature Communications 16, 11648 (2025). 

DOI: 10.1038/s41467-025-66770-0